Two dimensional hard x-ray nanofocusing with crossed multilayer Laue lenses

作者：Hanfei Yan, Volker Rose, Deming Shu, Enju Lima, Hyon Chol Kang, Ray Conley, Chian Liu, Nima Jahedi, Albert T. Macrander, G. B. Stephenson, Martin V. Holt, Yong S. Chu, Ming Lu, J. Mäser · 发表于：Optics Express · 年份：2011 · DOI：10.1364/oe.19.015069 · 被引用次数：98 · 研究领域：Advanced X-ray Imaging Techniques、Advanced Electron Microscopy Techniques and Applications、X-ray Spectroscopy and Fluorescence Analysis

Hard x-ray microscopy with nanometer resolution will open frontiers in the study of materials and devices, environmental sciences, and life sciences by utilizing the unique characterization capabilities of x-rays. Here we report two-dimensional nanofocusing by multilayer Laue lenses (MLLs), a type of diffractive optics that is in principle capable of focusing x-rays to 1 nm. We demonstrate focusing to a 25 × 27 nm(2) FWHM spot with an efficiency of 2% at a photon energy of 12 keV, and to a 25 × 40 nm(2) FWHM spot with an efficiency of 17% at a photon energy of 19.5 keV.