A Direct Mapping Algorithm for Phase-measuring Profilometry

作者：Wenliang Zhou, Xiaohong Su · 发表于：Journal of Modern Optics · 年份：1994 · DOI：10.1080/09500349414550101 · 被引用次数：169 · 研究领域：Optical measurement and interference techniques、Advanced Measurement and Metrology Techniques、Surface Roughness and Optical Measurements

A direct phase-to-height mapping algorithm for phase-measuring profilometry is presented and verified by experiments. The direct mapping formula can be generated by measuring the phases of several different parallel planes rather than geometric parameters of the optical system. Therefore, it can speed up the calculation and reduce systematic errors.