Conducting polymers in microelectronics

作者：Marie Angelopoulos · 发表于：IBM Journal of Research and Development · 年份：2001 · DOI：10.1147/rd.451.0057 · 被引用次数：288 · 研究领域：Conducting polymers and applications、Advanced Sensor and Energy Harvesting Materials、Organic Electronics and Photovoltaics

Conjugated polymers in the nondoped and doped conducting state have an array of potential applications in the microelectronics industry. Conducting polymers are effective discharge layers as well as conducting resists in electron beam lithography, find applications in metallization (electrolytic and electroless) of plated through-holes for printed circuit board technology, provide excellent electrostatic discharge protection for packages and housings of electronic equipment, provide excellent corrosion protection for metals, and may have applications in electromagnetic interference shielding. This paper reviews some of these applications and briefly describes possible future applications of conducting polymers for use as interconnections or for electronic devices.