Evaluation of fluorinated polyimide etching processes for optical waveguide fabrication

作者：J.H. Kim, EunA Kim, Hwan-Young Choi, C.W. Kim, Jihoon Cho, Y.W. Lee, Bong‐Hyun You, Shuangshuang Yi, H.J. Lee, Kwansoo Han, Woo‐Hyuk Jang, T.H. Rhee, J.W. Lee, S. J. Pearton · 发表于：Thin Solid Films · 年份：1999 · DOI：10.1016/s0040-6090(98)01554-5 · 被引用次数：14 · 研究领域：Semiconductor Lasers and Optical Devices、Synthesis and properties of polymers、Photonic and Optical Devices