Nanometer-Scale Fabrication by Simultaneous Nanoshaving and Molecular Self-Assembly

作者：Song Xu, Gang-yu Liu · 发表于：Langmuir · 年份：1997 · DOI：10.1021/la962029f · 被引用次数：372 · 研究领域：Molecular Junctions and Nanostructures、Force Microscopy Techniques and Applications、Nanofabrication and Lithography Techniques

Nanostructures down to a few nanometers in size and composed of close-packed and well-ordered molecules have been fabricated by simultaneous nanoshaving using an atomic force microscopy (AFM) tip and alkanethiols' self-assembly on gold. Compared with other microfabrication methods, this procedure allows more precise control in terms of the size and geometry of the fabricated features. An edge resolution better than 2 nm can be routinely obtained. In addition, the fabricated nanostructures can be quickly changed, modified, and characterized in situ . These advantages should make this method very useful in the development of prototypical nanoelectronic devices and, perhaps more importantly, in the study of spatially confined chemical reactions.