Microelectromechanical systems for biomimetical applications

作者：Rhonira Latif, Enrico Mastropaolo, Andy Bunting, Rebecca Cheung, Thomas Jacob Koickal, Alister Hamilton, Michael Newton, Leslie S. Smith · 发表于：Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 年份：2010 · DOI：10.1116/1.3504892 · 被引用次数：17 · 研究领域：Advanced MEMS and NEMS Technologies、Acoustic Wave Resonator Technologies、Mechanical and Optical Resonators

An etch release process capable of releasing long resonant gate transistor bridges from a sacrificial layer has been studied as a step towards developing a system to mimic the cochlear mechanism inside the human ear. The developed etch release process involves the use of a gentle etch tool that is capable of a clean and damage-free etch release. The influence of temperature and oxygen/nitrogen gas flow rates on the undercut etch rates and the profiles of photoresist and polyimide sacrificial layers have been investigated. An array of aluminum bridges of length 0.278–1.618 mm, which cover the frequencies from 1 to 33.86 kHz, has been designed and released from a sacrificial layer. The resonating beams have been measured.