Atomic force microscopy dynamic modes: modeling and applications

作者：Yaxin Song, Bharat Bhushan · 发表于：Journal of Physics Condensed Matter · 年份：2008 · DOI：10.1088/0953-8984/20/22/225012 · 被引用次数：66 · 研究领域：Force Microscopy Techniques and Applications、Mechanical and Optical Resonators、Advanced Surface Polishing Techniques

This paper contains a review of the development in modeling and applications of atomic force microscopy (AFM) modes. AFM is commonly used for atomic and nano-scale surface measurement. Two operational modes of AFM exist: static mode and dynamic mode. In dynamic AFM mode, a cantilever is driven to vibrate by its holder or the sample. The changes of cantilever vibration parameters due to tip–sample interaction are used to reveal surface properties of samples. Analytical and numerical models that can accurately simulate surface-coupled cantilever dynamics are essential for explaining AFM scanning images and evaluating a sample's material properties. The objective of this paper is to categorize the existing AFM dynamic modes and measurement techniques in terms of cantilever deflection and excitation mechanism, summarize AFM cantilever models presented in the literature, and demonstrate the applications of these models in AFM mode simulations. Based on the relations between cantilever responses and tip–sample interaction, methods for quantitative evaluation of a sample's mechanical parameters are described.