Titanium nitride films for ultrasensitive microresonator detectors

作者：Henry George LeDuc, B. Bumble, Peter K. Day, Byeong Ho Eom, Jiansong Gao, S. R. Golwala, Benjamin A. Mazin, Sean G. McHugh, Andrew Merrill, David C. Moore, Omid Noroozian, Anthony Turner, Jonas Stasys Zmuidzinas · 发表于：Applied Physics Letters · 年份：2010 · DOI：10.1063/1.3480420 · 被引用次数：246 · 研究领域：GaN-based semiconductor devices and materials、Superconducting and THz Device Technology、Acoustic Wave Resonator Technologies

Titanium nitride (TiNx) films are ideal for use in superconducting microresonator detectors for the following reasons: (a) the critical temperature varies with composition (0 107) and have noise properties similar to resonators made using other materials, while the quasiparticle lifetimes are reasonably long, 10–200 μs. TiN microresonators should therefore reach sensitivities well below 10−19 W Hz−1/2.