Measurement of mechanical resonance and losses in nanometer scale silicon wires

作者：D. W. Carr, Stéphane Evoy, Lidija Sekaric, H. G. Craighead, J. M. Parpia · 发表于：Applied Physics Letters · 年份：1999 · DOI：10.1063/1.124554 · 被引用次数：316 · 研究领域：Advanced MEMS and NEMS Technologies、Mechanical and Optical Resonators、Force Microscopy Techniques and Applications

We present data on nanofabricated suspended silicon wires driven at resonance. The wires are electrostatically driven and detected optically. We have observed wires with widths as small as 45 nm and resonant frequencies as high as 380 MHz. We see a strong dependence of the resonant quality factor on the surface to volume ratio.