A planar integrated chlorinated hydrocarbon gas sensor on a silicon substrate

作者：Darioush Keyvani, Jordan Maclay, S. Lee, Joseph R. Stetter, Zhi Cao · 发表于：Sensors and Actuators B Chemical · 年份：1991 · DOI：10.1016/0925-4005(91)80247-h · 被引用次数：4 · 研究领域：Gas Sensing Nanomaterials and Sensors、Advanced Chemical Sensor Technologies、Analytical Chemistry and Sensors