Sensitive detection of nanomechanical motion using piezoresistive signal downmixing

作者：Igor Bargatin, E. B. Myers, Jessica Arlett, B. Gudlewski, M. L. Roukes · 发表于：Applied Physics Letters · 年份：2005 · DOI：10.1063/1.1896103 · 被引用次数：118 · 研究领域：Mechanical and Optical Resonators、Force Microscopy Techniques and Applications、Advanced MEMS and NEMS Technologies

We have developed a method of measuring rf-range resonance properties of nanoelectromechanical systems (NEMS) with integrated piezoresistive strain detectors serving as signal downmixers. The technique takes advantage of the high strain sensitivity of semiconductor-based piezoresistors, while overcoming the problem of rf signal attenuation due to a high source impedance. Our technique also greatly reduces the effect of the cross-talk between the detector and actuator circuits. We achieve thermomechanical noise detection of cantilever resonance modes up to 71MHz at room temperature, demonstrating that downmixed piezoresistive signal detection is a viable high-sensitivity method of displacement detection in high-frequency NEMS.