Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching

作者：Yves Bellouard, Ali A. Said, Mark Dugan, Philippe Bado · 发表于：Optics Express · 年份：2004 · DOI：10.1364/opex.12.002120 · 被引用次数：505 · 研究领域：Laser Material Processing Techniques、Advanced Surface Polishing Techniques、Laser-induced spectroscopy and plasma

We present novel results obtained in the fabrication of high-aspect ratio micro-fluidic microstructures chemically etched from fused silica substrates locally exposed to femtosecond laser radiation. A volume sampling method to generate three-dimensional patterns is proposed and a systematic SEM-based analysis of the microstructure is presented. The results obtained gives new insights toward a better understanding of the femtosecond laser interaction with fused silica glass (a-SiO(2)).