Design of DSP-based control system for Six-axis electrostatically Suspended Micro-machined Accelerometer

作者：Yuan Qin, Weiping Zhang, Wu Liu, Wenyuan Chen, Feng Cui, Zhen Wan, Xiaosheng Wu · 年份：2011 · DOI：10.1109/icssem.2011.6081223 · 研究领域：Advanced MEMS and NEMS Technologies、Geophysics and Sensor Technology、Mechanical and Optical Resonators

Electrostatically Suspended Micro-machined Accelerometer (ESMA) is designed with a stator- mass-stator triple stack structure based on non-silicon MEMS technology. A six-axis closed-loop measurement and levitated control system for ESMA is proposed, which employs TSM320F28335 digital signal processor as the developing platform. Fuzzy PID algorithm is used in the levitated control system, and a simulation experiment in matlab is carried out. The extended A\D, D\A convert circuits are programmed to get 7-channel amplified signals from the device and apply 14-channel feedback voltages on corresponding electrodes. Concurrently, a controllable electrostatic force is provided by these feedback voltages to guarantee that the proof mass can suspend in the center of the cavity between electrode plates in ESMA.