An electrostatic scanning micromirror with diaphragm mirror plate and diamond-shaped reinforcement frame

作者：Chang‐Hyeon Ji, Moongoo Choi, Sang-Cheon Kim, See-Hyung Lee, Seong-Hyok Kim, Youngjoo Yee, Jong-Uk Bu · 发表于：Journal of Micromechanics and Microengineering · 年份：2006 · DOI：10.1088/0960-1317/16/5/021 · 被引用次数：54 · 研究领域：Advanced MEMS and NEMS Technologies、Analytical Chemistry and Sensors、Photonic and Optical Devices

An electrostatic scanning micromirror with diaphragm mirror plate and diamond-shaped reinforcement frame, Ji, Chang-Hyeon, Choi, Moongoo, Kim, Sang-Cheon, Lee, See-Hyung, Kim, Seong-Hyok, Yee, Youngjoo, Bu, Jong-Uk