Sang Woo Park
发表论文 3 篇 · 总被引 29 次 · h-index 2
代表论文
- Unraveling diffusion behavior in Cu-to-Cu direct bonding with metal passivation layers (2024 · Scientific Reports · 被引 21)
- First Demonstration of Enhanced Cu-Cu Bonding at Low Temperature With Ruthenium Passivation Layer (2024 · IEEE Access · 被引 10)
- Influence of deposition conditions on ALD based Ru passivation for Cu-Cu hybrid bonding (2025 · Scientific Reports · 被引 3)