B. Zopé
发表论文 6 篇 · 总被引 2 次 · h-index 1
代表论文
- Area-Selective Atomic Layer Deposition of SiO2 on SiO2 with Alkanethiol Functionalized Cu as the Nongrowth Surface. (2026 · ACS Applied Materials and Interfaces · 被引 1)
- Effect of Aminosilane Precursor and Surface Silanol Density on the Growth per Cycle during Atomic Layer Deposition of SiO2. (2025 · Langmuir · 被引 1)
- (Invited) Material and Process Co-Optimization for Semiconductor Device Manufacturing (2025 · ECS Meeting Abstracts)
- Ligand Engineering to Machine learning : Optimizing Ru ALD for Ultrathin Film Deposition (2024 · International Interconnect Technology Conference)
- Halogen Free Low Temperature ALD Mo-based Films for Interconnects Applications (2024 · International Interconnect Technology Conference)
- Applications in ULSI BEOL: Interconnects, Diffusion Barriers, & DRAM