Cheng-Hsuan Kuo

发表论文 18 篇 · 总被引 63 次 · h-index 5

代表论文

Sub-Nanometer Interfacial Oxides on Highly Oriented Pyrolytic Graphite and Carbon Nanotubes Enabled by Lateral Oxide Growth. (2022 · ACS Applied Materials and Interfaces · 被引 22)
Low-Resistivity Titanium Nitride Thin Films Fabricated by Atomic Layer Deposition with TiCl4 and Metal–Organic Precursors in Horizontal Vias (2023 · ACS Applied Electronic Materials · 被引 11)
Gallium phosphide conformal film growth on in-situ tri-TBP dry-cleaned InGaP/GaAs using atomic hydrogen ALD (2023 · Vacuum · 被引 8)
Low Resistivity Titanium Nitride Thin Film Fabricated by Atomic Layer Deposition with TiCl4 and Metal-Organic Precursors in Horizontal Vias (2022 · International Interconnect Technology Conference · 被引 7)
Plasma Enhanced Atomic Layer Deposition of Crystallized Gallium Phosphide on Si with tri-Ethylgallium and tri-tert-Butylphosphine (2023 · Applications of Surface Science · 被引 6)
Inverse Hybrid Bonding with Metal Oxide Framework as Infill for Heterogeneous Integration (2024 · Electronic Components and Technology Conference · 被引 3)