Chao Gao

发表论文 31 篇 · 总被引 301 次 · h-index 9

代表论文

• Design, Fabrication, and Characterization of Aluminum Scandium Nitride-Based Thin Film Bulk Acoustic Wave Filter (2023 · Journal of microelectromechanical systems · 被引 27)
• Investigation of film bulk acoustic resonators for sensing applications in liquid environment (2022 · Applied Physics Letters · 被引 14)
• Effects of Growth Temperature and Reactor Pressure on AlN Thin Film Grown by Metal-Organic Chemical Vapor Deposition (2023 · Thin Solid Films · 被引 12)
• Influence of Etching Trench on Keff2 of Film Bulk Acoustic Resonator (2022 · Micromachines · 被引 11)
• 5.5 GHz film bulk acoustic wave filters using thin film transfer process for WLAN applications (2024 · Microsystems & Nanoengineering · 被引 10)
• Investigation of thermal annealing on the characteristics of Sc Al1−N thin films (2023 · Vacuum · 被引 10)