H. Beneking

机构：RWTH Aachen University

发表论文 219 篇 · 总被引 1811 次 · h-index 21

代表论文

• Nanostructure fabrication using lithium fluoride films as an electron beam resist (1992 · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 被引 27)
• The resolution of the inorganic electron beam resist LiF(AlF3) (1994 · Microelectronic Engineering · 被引 17)
• Silicon etched-groove permeable base transistors with 90-nm finger width (1990 · IEEE Electron Device Letters · 被引 17)
• RIE etching of deep trenches in Si using CBrF3 and SF6 plasma (1987 · Microelectronic Engineering · 被引 17)
• A novel MOVPE reactor with a rotating substrate (1988 · Journal of Crystal Growth · 被引 16)
• Submicrometre silicon permeable base transistors with buried CoSi 2 gates (1993 · Electronics Letters · 被引 14)