Mehdi Vaez-Iravani

机构：KLA (United States)

发表论文 27 篇 · 总被引 681 次 · h-index 8

代表论文

Near-field differential scanning optical microscope with atomic force regulation (1992 · Applied Physics Letters · 被引 460)
Wafer inspection technology challenges for ULSI manufacturing (1998 · 被引 49)
On the heating of the fiber tip in a near-field scanning optical microscope (1995 · Applied Physics Letters · 被引 47)
Observation of Polymer Birefringence in Near-Field Optical Microscopy (1996 · Langmuir · 被引 23)
Correlative imaging in scanning near-field optical microscopy (1993 · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 被引 23)
Resolution beyond the diffraction limit using frequency-domain field confinement in scanning microscopy (1995 · Ultramicroscopy · 被引 13)