Sunil Wickramanayaka

发表论文 77 篇 · 总被引 776 次 · h-index 15

代表论文

Heterogeneous 2.5D integration on through silicon interposer (2015 · Applied Physics Reviews · 被引 169)
Oligomerization and Polymerization Steps in Remote Plasma Chemical Vapor Deposition of Silicon−Carbon and Silica Films from Organosilicon Sources (2001 · Chemistry of Materials · 被引 36)
Electrical properties of amorphous high-/spl kappa/ HfTaTiO gate dielectric with dielectric constants of 40-60 (2005 · IEEE Electron Device Letters · 被引 34)
High quality SiO2 depositions from TEOS by ECR plasma (1996 · Thin Solid Films · 被引 34)
Mechanism of Amorphous Silica Film Formation from Tetraethoxysilane in Atomic Oxygen‐Induced Chemical Vapor Deposition (1998 · Journal of The Electrochemical Society · 被引 24)
Atomic hydrogen-induced chemical vapor deposition of a-Si:C:H thin-film materials from alkylsilane precursors (1997 · Diamond and Related Materials · 被引 24)